Business Wire
WILMINGTON, Mass., July 12, 2023--Onto Innovation Inc. (NYSE: ONTO) today announced the introduction of the Atlas® S optical critical dimension metrology system and the Element™ S high-speed impurity mapping, dielectric film composition and epi thickness measurement system. The two new systems complement existing Dragonfly® inspection, IVS™ overlay, and Echo™ metrology product families building on the company’s strategy to provide a portfolio of comprehensive process control tools and software t